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Parameter: Resistivity

Resistivity Products 1D Line Scan 2D Imaging Handheld Device Single Point Reset Filter

Reference Sample Sets

Foil Sheet Resistance Reference Sample Set

Sheet Resistance Reference Sample Sets For Recalibration and Periodic Testing of System Accuracy Quality assurance Process control Yield improvement Customer trust by documented spool / roll report Send a Request Ask for Re-certification Introduction It is recommended to verify the accuracy for every measurement device at least every 12 months. SURAGUS reference standards are characterized […]

EddyCus® inline MCM

EddyCus® inline MCM

Measurement Chamber Addonfor Deposition Cluster Tools Higher Thin-film and substrate quality through fast and precise Near-process Measurement based on non-contact eddy current technology. Record a Line Profile of the wafer and thin-film. Test directly on product wafers Easy integration into tools Non-contact real time measurement Near-process monitoring High-speed and accurate High repeatability and long term […]

EddyCus® inline ICM

EddyCus® inline ICM

Retro-fit Sensor Integrationfor Deposition Cluster Tools Higher Thin-film quality through fast and precise Near-process Measurement based on non-contact eddy current technology. Record a line profile for each wafer before and after deposition.Sheet Resistance · Metal Layer Thickness · Resistivity Non-contact real time measurement High measurement speed up to 1,000 measurements/ sec. Fixed sensor installation or […]

EddyCus® inline RS

EddyCus® inline RS - Ringsensor with copper cable

Conductive Cable, Wire and Tube Testing Solutions for Process Control Higher Thin-film and substrate quality through fast and precise Inline Measurement based on non-contact eddy current technology. Quality assurance Process control Yield improvement Customer trust by documented spool / roll report Send a Request Request Demo Measurement Eddy Current Technology Download Data Sheet Contact Page […]