Multi-Purpose Single Point
Resistivity Tester
Higher material and substrate quality through fast and precise laboratory devices based on non-contact eddy current technology.
- Non-contact real time measurement
- Precise measurement of conductive thin films
- Characterization of hidden and encapsulated conductive layers
- 测量数据保存和导出功能
导言
The EddyCus® lab 2020 RMB is a unique industrial eddy current measurement device utilizing frequencies from 10 kHz up to 100 MHz dedicated to the characterization of flat specimen. The variation of the measurement frequency allows the control of the penetration depth. The measurement with high frequencies benefits the characterization of near surface material characteristics of bulk materials and thin films. Additionally, the sensitivity increases with increasing measurement frequency. Therefore, also very low conductive materials and layers can be characterized. Furthermore, the device supports the generation of depth profiles by utilization of multi frequency measurements. Measurement parameters are conductivity and related characteristics.
该设备通常用于
- Conductivity testing of bulk materials with different penetration depth
- Material sorting
- Metal layer thickness testing of conductive layers on non-conductive materials
- Paint thickness determination (lift-off) on conductive materials
- Characterization of material properties such as hardness or microstructure in thin near surface layers of highly and low conductive materials
传感器功能
Resistivity [1 – 1,000 mOhm·cm]
Sheet Resistance [0.01 – 100 Ohm/sq]
Metal Layer Thickness [2 nm – 2 mm]
测量领域
Sample sizes between 10 mm x 10 mm and 200 mm x 200 mm.
With markings for easy positioning.
Being open on all sides, the device imposes no size limitations.
功能和优点
Unlimited Sample Size
High Samples Measurable
各种分析选项
Instant Results
Manual Mappings
易于使用
3D 查看器
一台设备，多种测量参数
The EddyCus® lab 2020 RMB is capable of measuring multiple parameters. Sheet resistance correlates with metal layer thickness, resistivity and conductivity. As long as the material properties are well known, all of these parameters can be measured with high precision.
- 电阻率
- 电导率
- 板材阻力
- 金属层厚度
软件和设备控制
- 非常方便用户使用的软件
- Intuitive, touch display navigation
- Real-time measurement of sheet resistance and layer thickness
- Software-assisted manual mapping option
- Various data saving and export options
Video of the EddyCus® lab 2020 RMB
The video gives you an impression of how to use the lab 2020 RMB. Which materials can be analysed and how the device works in general.
Data Table for EddyCus® lab 2020 RMB
设备功能
| 测量技术 | High frequency eddy current sensor |
| Materials | Si, SiC, alloys, metals, carbon-based materials |
| 基底面积 | 8 inch / 204 mm x 204 mm |
| Max. sample dimensions | Unrestricted (device open on all sides) |
| 可用的测量功能 | Sheet resistance Metal thickness monitor Conductivity Resistivity |
| 测量范围/精度 | 取决于测量任务、材料成分和测试对象体积。请咨询 SURAGUS 团队 |
| 设备尺寸（W/H/D） | 11.4“ x 5.5” x 17.5“ / 290 mm x 92 mm x 445 mm |
| 重量 | 10 kg |
测量能力
| 电阻率测量 | |
|---|---|
| Resistivity measurement range (Two sensor setups available) |
1 – 100 mOhm·cm; < 3 % accuracy 1 – 1,000 mOhm·cm; 1 – 5 % accuracy |
板材电阻测量 |
| Sheet resistance measurement range (Two sensor setups available) |
0.01 – 10 Ohm/sq < 3 % accuracy 0.01 – 100 Ohm/sq < 3 % accuracy |
| 金属膜（如铜）厚度测量范围 | 2 nm - 2 mm（根据板材电阻（参见我们的计算器） | 金属层厚度测量 |
| 金属膜（如铜）厚度测量范围 | 2 nm - 2 mm（根据板材电阻（参见我们的计算器） |