Overview of SURAGUS Products

Single Point Measurement Solutions

EddyCus® 便携式

Handheld for quick checks of flat materials 

EddyCus® 便携式 PS

Handheld with external sensor for quick checks of bulk materials or curved surfaces

EddyCus® 实验室 2020 TM

Benchtop for flat materials such as foils, wafer or glass

EddyCus® lab 2020 RMB

Benchtop for bulk materials such as pucks, boules or ingots

Imaging Solutions

EddyCus® 地图 2530 TM

Benchtop device for flat materials such as foils, wafer or glass

EddyCus® 地图 2530 元人民币

Benchtop device for bulk materials such as pucks, boules or ingots

艾迪库斯®地图 2530 RMT

Benchtop device for bulk and slightly curved materials such as pucks or boules

EddyCus® ResMapper

Fully-automated wafer imaging tool

EddyCus® map IK

Mapping integration kit 

Sensor Modules for Tool Integration

EddyCus® 直列式 MCM

Measurement chamber for deposition tools.

EddyCus® 在线 ICM

Interconnection module between handling area and deposition chamber

EddyCus® 直通式 SLIM

Measurement add-on for existing gates or link transfers for deposition tools.

Sensors for Inline Integration

传感器M

传感器 S

传感器XS

传感器XXS

Pin Sensor

Sensor SemiVac

Sensor ASU

Ringsensor