SURAGUS 传感器概述
SURAGUS 传感器用途广泛，可以方便地在任何生产线上加装在线监测系统。
- 非接触式测量
- 高度灵活
- Ex-vacuo, in-vacuo, ATEX 和高温型号
导言
SURAGUS 提供多种具有相同功能的传感器。不同类型的传感器可满足特定的空间要求。S 型和 XS 型传感器占地面积小，但高度要求较高。通常用于辊筒之间和狭小生产线的测量。传感器 M 所需高度较小，通常用于没有尺寸限制的场合。半真空传感器是一种传感器的一部分位于真空内部，而另一部分位于真空外部的传感器类型。这在高真空应用中具有优势。下文将详细介绍所有传感器选项。
Ex-vacuo/ in-vacuo
Ex-vacuo/ in-vacuo
Ex-vacuo
Ex-vacuo/ in-vacuo
Ex-vacuo/ in-vacuo
In-vacuo
Ex-vacuo
Ex-vacuo
涡流传感器 M
与 S 型传感器相比，M 型传感器所需的垂直空间较小，通常用于集成区域下方和上方空间较小的空间。这种传感器可用于非真空或真空应用。这种外壳类型可用于反射和透射模式设置。探头尺寸可以调整，以适应 1 至 100 毫米的线圈尺寸。
安装
- 顶部/底部安装
- 垂直和水平
尺寸
- 长度 80 毫米
- 宽度 100 毫米
- 高度 65 毫米
环境
- Ex-vacuo
- 根据要求提供 ATEX
| 片电阻范围 | Resistivity Range | 金属层厚度范围 | |
|---|---|---|---|
| Ultra Low | 0.008 – 10 mOhm/sq | In accordance with sheet resistance and thickness (please use our calculator) | 1 nm – 2 mm (In accordance with sheet resistance) (please use our calculator) |
| Very Low | 0.05 – 300 mOhm/sq | In accordance with sheet resistance and thickness (please use our calculator) | 1 nm – 2 mm (In accordance with sheet resistance) (please use our calculator) |
| Low | 0.001 – 100 Ohm/sq | In accordance with sheet resistance and thickness (please use our calculator) | 1 nm – 2 mm (In accordance with sheet resistance) (please use our calculator) |
| Wide Range | 0.001 – 3,000 Ohm/sq | In accordance with sheet resistance and thickness (please use our calculator) | 1 nm – 2 mm (In accordance with sheet resistance) (please use our calculator) |
| High | 100 – 300,000 Ohm/sq | In accordance with sheet resistance and thickness (please use our calculator) | 1 nm – 2 mm (In accordance with sheet resistance) (please use our calculator) |
| Anisotropy | 0.001 – 1,000 欧姆/平方 | ||
| ABS1 | 0.01 – 100 mOhm/sq | 1 nm – 2 mm (In accordance with sheet resistance) (please use our calculator) | |
| ABS2 | 0.01 – 10 Ohm/sq | 1 – 100 mOhm·cm | 1 nm – 2 mm (In accordance with sheet resistance) (please use our calculator) |
| ABS3 | 0.1 – 100 Ohm/sq | 1 nm – 2 mm (In accordance with sheet resistance) (please use our calculator) | |
| ABS4 | 1 – 100 Ohm/sq | 1 – 10 mOhm·cm | 1 nm – 2 mm (In accordance with sheet resistance) (please use our calculator) |
| HTR1 | 1 nm – 2 mm (In accordance with sheet resistance) (please use our calculator) | ||
| HTR2 | 0.001 – 1 Ohm/sq | 1 nm – 2 mm (In accordance with sheet resistance) (please use our calculator) | |
| HTR3 | 0.001 – 1 Ohm/sq | 1 nm – 2 mm (In accordance with sheet resistance) (please use our calculator) | |
| DIF1 | 0.001 – 1 Ohm/sq | 1 nm – 2 mm (In accordance with sheet resistance) (please use our calculator) | |
| HBR1 | 0.001 – 1 Ohm/sq | 1 nm – 2 mm (In accordance with sheet resistance) (please use our calculator) |
集成实例
涡流传感器 S
S 传感器（S 代表小型）是 SURAGUS 最受欢迎的传动传感器类型。其尺寸为 34 x 48 x 117 (WLH)，可安装在辊筒之间的狭窄空间或集成区域内的其他几何形状中。有两种电线出口（顶部和侧面），可实现整齐的集成和最佳布线。SURAGUS 提供两种类型的安装支架，可进行各种类型的安装（顶部、侧面......），便于调整传感器高度。该传感器可用于非真空或真空应用。
安装
- 顶部/底部安装
- 垂直和水平
尺寸
- 长度 48 毫米
- 宽度 34 毫米
- 高度 117 毫米
环境
- Ex-vacuo
- 空腔内
- 根据要求提供 ATEX
| 片电阻范围 | Resistivity Range | 金属层厚度范围 | |
|---|---|---|---|
| Ultra Low | 0.008 – 10 mOhm/sq | In accordance with sheet resistance and thickness (please use our calculator) | 1 nm – 2 mm (In accordance with sheet resistance) (please use our calculator) |
| Very Low | 0.05 – 300 mOhm/sq | In accordance with sheet resistance and thickness (please use our calculator) | 1 nm – 2 mm (In accordance with sheet resistance) (please use our calculator) |
| Low | 0.001 – 100 Ohm/sq | In accordance with sheet resistance and thickness (please use our calculator) | 1 nm – 2 mm (In accordance with sheet resistance) (please use our calculator) |
| Wide Range | 0.001 – 3,000 Ohm/sq | In accordance with sheet resistance and thickness (please use our calculator) | 1 nm – 2 mm (In accordance with sheet resistance) (please use our calculator) |
| High | 100 – 300,000 Ohm/sq | In accordance with sheet resistance and thickness (please use our calculator) | 1 nm – 2 mm (In accordance with sheet resistance) (please use our calculator) |
| Anisotropy | 0.001 – 1,000 欧姆/平方 |
集成实例
EddyCus® 传感器 XS
传感器 XS 是一种以反射模式运行的涡流传感器。它通常用于集成到 3D 机器人或以反射模式运行的扫描系统中。其直径仅为 30 毫米。
安装
- 顶部/底部安装
- 垂直和水平
- 可在 6 毫米范围内精确调节
尺寸
- 直径 30 毫米
- 高度 95 毫米
环境
- Ex-vacuo
- 根据要求提供 ATEX
| 片电阻范围 | Resistivity Range | 金属层厚度范围 | |
|---|---|---|---|
| ABS1 | 0.01 – 100 mOhm/sq | 1 nm – 2 mm (In accordance with sheet resistance) (please use our calculator) | |
| ABS2 | 0.01 – 10 Ohm/sq | 1 – 100 mOhm·cm | 1 nm – 2 mm (In accordance with sheet resistance) (please use our calculator) |
| ABS3 | 0.1 – 100 Ohm/sq | 1 nm – 2 mm (In accordance with sheet resistance) (please use our calculator) | |
| ABS4 | 1 – 100 Ohm/sq | 1 – 10 mOhm·cm | 1 nm – 2 mm (In accordance with sheet resistance) (please use our calculator) |
| HTR1 | 1 nm – 2 mm (In accordance with sheet resistance) (please use our calculator) | ||
| HTR2 | 0.001 – 1 Ohm/sq | 1 nm – 2 mm (In accordance with sheet resistance) (please use our calculator) | |
| HTR3 | 0.001 – 1 Ohm/sq | 1 nm – 2 mm (In accordance with sheet resistance) (please use our calculator) | |
| DIF1 | 0.001 – 1 Ohm/sq | 1 nm – 2 mm (In accordance with sheet resistance) (please use our calculator) | |
| HBR1 | 0.001 – 1 Ohm/sq | 1 nm – 2 mm (In accordance with sheet resistance) (please use our calculator) |
集成实例
EddyCus® 传感器 XXS
传感器 XXS 是最小的传输传感器解决方案，专用于空间狭小的测量环境。传感器直径仅为 12 毫米，高度为 50 毫米。该传感器可用于非真空或真空应用。这种外壳类型可用于反射和透射模式设置。该传感器还提供高温版本。当传感器 S 或传感器 M 不适用或需要应对高温时，通常会使用这种传感器。
安装
- 顶部/底部安装
- 垂直和水平
尺寸
- 直径 12 毫米
- 高度 50 毫米
环境
- 空腔内
- Ex-vacuo
- 根据要求提供 ATEX
| 片电阻范围 | Resistivity Range | 金属层厚度范围 | |
|---|---|---|---|
| Ultra Low | 0.008 – 10 mOhm/sq | In accordance with sheet resistance and thickness (please use our calculator) | 1 nm – 2 mm (In accordance with sheet resistance) (please use our calculator) |
| Very Low | 0.05 – 300 mOhm/sq | In accordance with sheet resistance and thickness (please use our calculator) | 1 nm – 2 mm (In accordance with sheet resistance) (please use our calculator) |
| Low | 0.001 – 100 Ohm/sq | In accordance with sheet resistance and thickness (please use our calculator) | 1 nm – 2 mm (In accordance with sheet resistance) (please use our calculator) |
| Wide Range | 0.001 – 3,000 Ohm/sq | In accordance with sheet resistance and thickness (please use our calculator) | 1 nm – 2 mm (In accordance with sheet resistance) (please use our calculator) |
| High | 100 – 300,000 Ohm/sq | In accordance with sheet resistance and thickness (please use our calculator) | 1 nm – 2 mm (In accordance with sheet resistance) (please use our calculator) |
| Anisotropy | 0.001 – 1,000 欧姆/平方 |
集成实例
EddyCus® 针式传感器
针式传感器是一种非常小巧的传输传感器解决方案，专用于集成我们的 ICM 模块。
安装
- 顶部/底部安装
- 垂直和水平
尺寸
- 直径 12 毫米
- 高度 50 毫米
环境
- 半吸尘器
- 根据要求提供 ATEX
| 片电阻范围 | Resistivity Range | 金属层厚度范围 | |
|---|---|---|---|
| Ultra Low | 0.008 – 10 mOhm/sq | In accordance with sheet resistance and thickness (please use our calculator) | 1 nm – 2 mm (In accordance with sheet resistance) (please use our calculator) |
| Very Low | 0.05 – 300 mOhm/sq | In accordance with sheet resistance and thickness (please use our calculator) | 1 nm – 2 mm (In accordance with sheet resistance) (please use our calculator) |
| Low | 0.001 – 100 Ohm/sq | In accordance with sheet resistance and thickness (please use our calculator) | 1 nm – 2 mm (In accordance with sheet resistance) (please use our calculator) |
| Wide Range | 0.001 – 3,000 Ohm/sq | In accordance with sheet resistance and thickness (please use our calculator) | 1 nm – 2 mm (In accordance with sheet resistance) (please use our calculator) |
| High | 100 – 300,000 Ohm/sq | In accordance with sheet resistance and thickness (please use our calculator) | 1 nm – 2 mm (In accordance with sheet resistance) (please use our calculator) |
| Anisotropy | 0.001 – 1,000 欧姆/平方 |
集成实例
EddyCus® 传感器 SemiVac
Sensor SemiVac 适用于空间要求有限的真空工具。它还能最大限度地减少真空中的体积和元件。有多种型号可供选择。所示版本通过 KF40 进行测量。其他选项可通过 PEAK 或玻璃窗进行测量。请咨询 SURAGUS 团队。该传感器可用于传输模式设置。
安装
- 顶部/底部安装
- 垂直和水平
尺寸
- 长度 80 毫米
- 宽度 100 毫米
- 高度 65 毫米
环境
- 半空腔
- 根据要求提供 ATEX
| 片电阻范围 | Resistivity Range | 金属层厚度范围 | |
|---|---|---|---|
| Ultra Low | 0.008 – 10 mOhm/sq | In accordance with sheet resistance and thickness (please use our calculator) | 1 nm – 2 mm (In accordance with sheet resistance) (please use our calculator) |
| Very Low | 0.05 – 300 mOhm/sq | In accordance with sheet resistance and thickness (please use our calculator) | 1 nm – 2 mm (In accordance with sheet resistance) (please use our calculator) |
| Low | 0.001 – 100 Ohm/sq | In accordance with sheet resistance and thickness (please use our calculator) | 1 nm – 2 mm (In accordance with sheet resistance) (please use our calculator) |
| Wide Range | 0.001 – 3,000 Ohm/sq | In accordance with sheet resistance and thickness (please use our calculator) | 1 nm – 2 mm (In accordance with sheet resistance) (please use our calculator) |
| High | 100 – 300,000 Ohm/sq | In accordance with sheet resistance and thickness (please use our calculator) | 1 nm – 2 mm (In accordance with sheet resistance) (please use our calculator) |
| Anisotropy | 0.001 – 1,000 欧姆/平方 |
集成实例
EddyCus® 传感器 ASU
传感器 ASU 是一种用于气隙测量的传输传感器。它包括传感器内的整个测量电子装置。
安装
- 顶部/底部安装
- 垂直和水平
尺寸
- 长度 80 毫米
- 宽度 34 毫米
- 高度 112.5 毫米
环境
- Ex-vacuo
- 根据要求提供 ATEX
| 片电阻范围 | Resistivity Range | 金属层厚度范围 | |
|---|---|---|---|
| Ultra Low | 0.008 – 10 mOhm/sq | In accordance with sheet resistance and thickness (please use our calculator) | 1 nm – 2 mm (In accordance with sheet resistance) (please use our calculator) |
| Very Low | 0.05 – 300 mOhm/sq | In accordance with sheet resistance and thickness (please use our calculator) | 1 nm – 2 mm (In accordance with sheet resistance) (please use our calculator) |
| Low | 0.001 – 100 Ohm/sq | In accordance with sheet resistance and thickness (please use our calculator) | 1 nm – 2 mm (In accordance with sheet resistance) (please use our calculator) |
| Wide Range | 0.001 – 3,000 Ohm/sq | In accordance with sheet resistance and thickness (please use our calculator) | 1 nm – 2 mm (In accordance with sheet resistance) (please use our calculator) |
| High | 100 – 300,000 Ohm/sq | In accordance with sheet resistance and thickness (please use our calculator) | 1 nm – 2 mm (In accordance with sheet resistance) (please use our calculator) |
| Anisotropy | 0.001 – 1,000 欧姆/平方 |
集成实例
EddyCus® Sensor ASU G2
The Sensor ASU G2 is a transmission sensor for ex-vacuo measurement. It includes the whole measurement electronic within the sensor.
安装
- 顶部/底部安装
- 垂直和水平
尺寸
- Length 138 mm
- Width 90 mm
- Height 34 mm
环境
- Ex-vacuo
- 根据要求提供 ATEX
| 片电阻范围 | Resistivity Range | 金属层厚度范围 |
|---|---|---|
| 0.001 – 20 Ohm/sq | In accordance with sheet resistance and thickness (please use our calculator) | 1 nm – 2 mm (In accordance with sheet resistance) (please use our calculator) |
集成实例
Click to activate
片电阻范围
Min
Max
Sheet Resistance SI uses OPS as base unit
Resistivity Range
Min
Max
Non conductive coating thickness [µm]
Min
Max
Layer Thickness
Your Resistivity
mOhmcm
Layer thickness per sensor is computed from each row sheet resistance range
Enter resistivity to fill the table column
电导率
Permittivity Testing
Multiple selection, AND logic
Multiple selection, AND logic