Multi-Purpose Single Point
Resistivity Tester
Higher material and substrate quality through fast and precise laboratory devices based on non-contact eddy current technology.
- Non-contact real time measurement
- Precise measurement of conductive thin films
- Characterization of hidden and encapsulated conductive layers
- Measurement data saving and export functions
Introduction
The EddyCus® lab 2020 RMB is a unique industrial eddy current measurement device utilizing frequencies from 10 kHz up to 100 MHz dedicated to the characterization of flat specimen. The variation of the measurement frequency allows the control of the penetration depth. The measurement with high frequencies benefits the characterization of near surface material characteristics of bulk materials and thin films. Additionally, the sensitivity increases with increasing measurement frequency. Therefore, also very low conductive materials and layers can be characterized. Furthermore, the device supports the generation of depth profiles by utilization of multi frequency measurements. Measurement parameters are conductivity and related characteristics.
The device is typically used for:
- Conductivity testing of bulk materials with different penetration depth
- Material sorting
- Metal layer thickness testing of conductive layers on non-conductive materials
- Paint thickness determination (lift-off) on conductive materials
- Characterization of material properties such as hardness or microstructure in thin near surface layers of highly and low conductive materials
Sensor Capabilities
Resistivity [1 – 1,000 mOhm·cm]
Sheet Resistance [0.01 – 100 Ohm/sq]
Metal Layer Thickness [2 nm – 2 mm]
Measurement Field
Sample sizes between 10 mm x 10 mm and 200 mm x 200 mm.
With markings for easy positioning.
Being open on all sides, the device imposes no size limitations.
Features and Benefits
Unlimited Sample Size
High Samples Measurable
Various Analyzing Options
Instant Results
Manual Mappings
Easy to Use
3D Viewer
One Device, Multiple Measurement Parameters
The EddyCus® lab 2020 RMB is capable of measuring multiple parameters. Sheet resistance correlates with metal layer thickness, resistivity and conductivity. As long as the material properties are well known, all of these parameters can be measured with high precision.
- Resistivity
- Conductivity
- Sheet resistance
- Metal layer thickness
Software and Device Control
- Very user-friendly software
- Intuitive, touch display navigation
- Real-time measurement of sheet resistance and layer thickness
- Software-assisted manual mapping option
- Various data saving and export options
Video of the EddyCus® lab 2020 RMB
The video gives you an impression of how to use the lab 2020 RMB. Which materials can be analysed and how the device works in general.
Areas of Application
Data Table for EddyCus® lab 2020 RMB
Device Features
| Measurement technology | High frequency eddy current sensor |
| Materials | Si, SiC, alloys, metals, carbon-based materials |
| Substrate area | 8 inch / 204 mm x 204 mm |
| Max. sample dimensions | Unrestricted (device open on all sides) |
| Available measurement features | Sheet resistance Metal thickness monitor Conductivity Resistivity |
| Measurement range / accuracy | Depends on the measurement task, the material composition and the test object volume. Please consult the SURAGUS team |
| Device dimensions (w/h/d) | 11.4“ x 5.5” x 17.5“ / 290 mm x 92 mm x 445 mm |
| Weight | 10 kg |
Measurement Capabilities
| Resistivity measurement | |
|---|---|
| Resistivity measurement range (Two sensor setups available) |
1 – 100 mOhm·cm; < 3 % accuracy 1 – 1,000 mOhm·cm; 1 – 5 % accuracy |
Sheet resistance measurement |
| Sheet resistance measurement range (Two sensor setups available) |
0.01 – 10 Ohm/sq < 3 % accuracy 0.01 – 100 Ohm/sq < 3 % accuracy |
| Thickness measurement range of metal films (e.g. copper) | 2 nm – 2 mm (in accordance with sheet resistance (cf. our calculator)) | Metal layer thickness measurement |
| Thickness measurement range of metal films (e.g. copper) | 2 nm – 2 mm (in accordance with sheet resistance (cf. our calculator)) |
