EddyCus® inline SLIM
EddyCus® inline SLIM – Smart Link Integrated Module Use existing gates and link transfers: equip them with a measurement add-on to generate early-stage measurement data. Non-contact and non-destructive Near-process monitoring High-speed and accurate High repeatability and long term stability Test directly on product wafers Easy integration into tools Contact Us Request Demo Measurement Eddy Current […]
EddyCus® inline RS for Pastes and Slurries
Conductive Slurry and Paste Testing Solutions for Process Control Higher process and material quality through fast and precise Inline Measurement based on non-contact eddy current technology. Quality assurance Process control Yield improvement Customer trust by documented spool / roll report Contact Us Request Demo Measurement Eddy Current Technology Download Data Sheet Contact Page Call +49 […]
EddyCus® lab 2020 RMB for Slurry and Paste
Multi-Purpose Single Point Tester for Pastes and Slurries Pastes and Slurries Composition quality through fast and precise laboratory devices based on non-contact eddy current technology. Real time measurement Accurate single-point measurement of the permittivity for non-conductive materials (F/m) Manual mapping of permittivity guided by an easy-to-handle software Contact Us Request Demo Measurement Eddy Current Technology […]
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EddyCus® inline MCM
Measurement Chamber Addonfor Deposition Cluster Tools Higher Thin-film and substrate quality through fast and precise Near-process Measurement based on non-contact eddy current technology. Record a Line Profile of the wafer and thin-film. Test directly on product wafers Easy integration into tools Non-contact real time measurement Near-process monitoring High-speed and accurate High repeatability and long term […]
EddyCus® inline ICM
Retro-fit Sensor Integrationfor Deposition Cluster Tools Higher Thin-film quality through fast and precise Near-process Measurement based on non-contact eddy current technology. Record a line profile for each wafer before and after deposition.Sheet Resistance · Metal Layer Thickness · Resistivity Non-contact real time measurement High measurement speed up to 1,000 measurements/ sec. Fixed sensor installation or […]
EddyCus® inline RS
Conductive Cable, Wire and Tube Testing Solutions for Process Control Higher Thin-film and substrate quality through fast and precise Inline Measurement based on non-contact eddy current technology. Quality assurance Process control Yield improvement Customer trust by documented spool / roll report Contact Us Request Demo Measurement Eddy Current Technology Download Data Sheet Contact Page Call […]
EddyCus® inline Sensorline
Full-area Sheet Resistance and Layer Thickness Measurement Solution for Process Control Higher Thin-film and substrate quality through fast and precise multi sensor Inline Measurement based on non-contact eddy current technology. Non-contact real time measurement High measurement speed up to 50 measurements/ sec. Fixed sensor installation or traversing sensor installation Integration of 1 – 99 monitoring […]
EddyCus® inline
Non-Contact Process and Quality Monitoringfor Conductive Materials and Coatings highly flexible inline measurement solutions, seamlessly adaptable to your specific production process. Non-contact real time measurement High measurement speed up to 1,000 measurements/ sec. Fixed sensor installation or traversing sensor installation Integration of 1 – 99 monitoring lanes per system Process control at atmosphere or in […]
EddyCus® ResMapper
Fully Automated Wafer Imaging Device with Automated Cassette Handling System Higher Thin-film and substrate quality through fast and precise mapping devices based on non-contact eddy current technology. High resolution images with over 20 000 measurement points Up to 60 wafers per hour Measurement up to the edge of the sample All-in-one measurement of optical and […]