EddyCus® inline SLIM

EddyCus® inline SLIM – Smart Link Integrated Module Use existing gates and link transfers: equip them with a measurement add-on to generate early-stage measurement data. Non-contact and non-destructive Near-process monitoring High-speed and accurate High repeatability and long term stability Test directly on product wafers Easy integration into tools Contact Us Request Demo Measurement Eddy Current […]

EddyCus® inline RS for Pastes and Slurries

Conductive Slurry and Paste Testing Solutions for Process Control Higher process and material quality through fast and precise Inline Measurement based on non-contact eddy current technology. Quality assurance Process control Yield improvement Customer trust by documented spool / roll report Contact Us Request Demo Measurement Eddy Current Technology Download Data Sheet Contact Page Call +49 […]

EddyCus® lab 2020 RMB for Slurry and Paste

Multi-Purpose Single Point Tester for Pastes and Slurries Pastes and Slurries Composition quality through fast and precise laboratory devices based on non-contact eddy current technology. Real time measurement Accurate single-point measurement of the permittivity for non-conductive materials (F/m) Manual mapping of permittivity guided by an easy-to-handle software Contact Us Request Demo Measurement Eddy Current Technology […]

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Measurement Service

Measurement-as-a-Service For companies that do not operate continuous quality control and only measure a few times a year. Non-contact measurement No space for a measurement device required No budget required for a self-owned measurement device No training period for a measurement expert required Contact Us Introduction You benefit from the experience of our employees who […]

Reference Sample Sets

Sheet Resistance Reference Sample Sets For Recalibration and Periodic Testing of System Accuracy Quality assurance Process control Yield improvement Customer trust by documented spool / roll report Contact Us Ask for Re-certification Introduction It is recommended to verify the accuracy for every measurement device at least every 12 months. SURAGUS reference standards are characterized by […]

EddyCus® inline MCM

Measurement Chamber Addonfor Deposition Cluster Tools Higher Thin-film and substrate quality through fast and precise Near-process Measurement based on non-contact eddy current technology. Record a Line Profile of the wafer and thin-film. Test directly on product wafers Easy integration into tools Non-contact real time measurement Near-process monitoring High-speed and accurate High repeatability and long term […]

EddyCus® inline ICM

Retro-fit Sensor Integrationfor Deposition Cluster Tools Higher Thin-film quality through fast and precise Near-process Measurement based on non-contact eddy current technology. Record a line profile for each wafer before and after deposition.Sheet Resistance · Metal Layer Thickness · Resistivity Non-contact real time measurement High measurement speed up to 1,000 measurements/ sec. Fixed sensor installation or […]

EddyCus® inline RS

Conductive Cable, Wire and Tube Testing Solutions for Process Control Higher Thin-film and substrate quality through fast and precise Inline Measurement based on non-contact eddy current technology. Quality assurance Process control Yield improvement Customer trust by documented spool / roll report Contact Us Request Demo Measurement Eddy Current Technology Download Data Sheet Contact Page Call […]

EddyCus® inline Sensorline

Full-area Sheet Resistance and Layer Thickness Measurement Solution for Process Control Higher Thin-film and substrate quality through fast and precise multi sensor Inline Measurement based on non-contact eddy current technology. Non-contact real time measurement High measurement speed up to 50 measurements/ sec. Fixed sensor installation or traversing sensor installation Integration of 1 – 99 monitoring […]