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EddyCus® inline MCM

Measurement Chamber Addonfor Deposition Cluster Tools Higher Thin-film and substrate quality through fast and precise Near-process Measurement based on non-contact eddy current technology. Record a Line Profile of the wafer and thin-film. Test directly on product wafers Easy integration into tools Non-contact real time measurement Near-process monitoring High-speed and accurate High repeatability and long term […]

EddyCus® ResMapper

Fully Automated Wafer Imaging Device with Automated Cassette Handling System Higher Thin-film and substrate quality through fast and precise mapping devices based on non-contact eddy current technology. High resolution images with over 20 000 measurement points Up to 60 wafers per hour Measurement up to the edge of the sample All-in-one measurement of optical and […]