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Non-contact Eddy Current
Mapping Integration Kit for
Sheet Resistance, Film Thickness
and Resistivity Imaging

Modular Sensor mapping integration kit to generate metal thinfilm thickness, sheet resistance or resistivity images of wafers, pucks and boules

  • High resolution images with up to 70,000 measurement points (300 mm @ 1 mm pitch)
  • Up to 40 wafers per hour
  • Measurement up to the edge of the sample
  • 2 – 12 inch wafers
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Introduction

The EddyCus® map IK is a mapping integration kit that consists of three modules. At its core is the sensor kit with sensors, measurement electronics and control unit. Depending on customer requirements the system can be configured for transmission mode with one sensor above and one sensor below the sample, or reflection mode with a single sensor placed either above or below. On request the sensor kit can be integrated into an existing motion system or combined with a dedicated motion solution from SURAGUS. When a SURAGUS solution is used a ready to use software module is available that already includes advanced measurement and recipe management as well as predefined motion control. As an alternative customers can develop their own software. Motion control is then handled via an OPC UA interface for PLC systems and the measurement electronics are accessed through a REST API. The following modules are available

  1. Base module – Sensor mapping kit
  2. Motion module
    1. Existing customer motion system
    2. SURAGUS standard movement
    3. SURAGUS performance movement
  3. Software module
    1. Customer specific integration
    2. SURAGUS MAP application

High frequency eddy current mapping solutions for contact free measurement of sheet resistance, resistivity and conductivity. Choose the integration level that best fits your application.

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MAP IK Sensor Mapping Kit Only

The EddyCus® map IK Sensor Mapping Kit is a sensor only kit without any motion hardware. It is based on contact free eddy current sensors, which are ideally suited for characterizing conductive layers and substrates. This includes:

  • Sheet resistance from 0.05 mOhm/sq to 300,000 Ohm/sq
  • Thickness of conductive layers from 1 nm to 100 µm
  • Resistivity from 0.1 to 1000 mOhm cm

Depending on your requirements three configurations are available

  • Transmission mode with a sensor gap up to 25 mm
  • Reflection mode
    • Top sensor configuration, especially suitable for boules
    • Bottom sensor configuration, especially suitable for pucks

The sensors can be integrated into your existing mapping system using various mounting options. STEP data is available on request.

If you do not have a motion platform, you can learn more about our standard movement or performance movement platforms in the following section or contact us directly for further options.

SURAGUS Movement Modules

Comparison of Standard and Performance Movement Modules of the Mapping Integration Kit

Die Performance Variante ist die max out Lösung wenn es um Geschwindigkeit und Messperformance geht. Die Standard Movement-Variante ist ein Kompromiss aus Budget und Messgeschwindigkeit und Messergebnis. Wenn das Budget hochgewichtet ist, empfehlen wir dir Map IK Light

SURAGUS Standard Movement SURAGUS Performance Movement
Technology Stepper motors Linear motors
Position Precision Feedback High Very High
Edge Exclusion 3 – 5 mm ≤1 mm
Movement Speed Up to 150 mm/s Up to 600 mm/s
Initalization Process Homing process for each imaging Instantly ready to scan (no homing process necessary)
Axle Movement Sequential movement of x and y axis Synchronious movement of x and y axis
Scanning Path Simple meander mode Complex but efficient paths are possible (due to synchronious movement)
Maintenance Lubrication once a year Practically no maintenance (lubrication every 500,000 km)
Reflection Mode Accuracy ±3 % via lift off compensation ±2 % via lift off compensation
±1 % through active piezo distance adaption
Performance Movement Only
Performance Movement Only
Sensor Mapping Kit with Performance Movement
Standard Movement Only
Standard Movement Only
Sensor Mapping Kit with Standard Movement

SURAGUS Standard Movement Module

The standard movement module is an extension module for the Sensor Mapping Kit. It features a stable table with a maximum scanning area of 320 x 320 mm and positioning aids for wafers from 2 inch up to 300 mm. A solid base plate ensures mechanical rigidity, and an integrated electronic board behind the actuators hosts the electronic components.

The system uses stepper motors and a proven XY stage and supports movement speeds of up to 150 mm per second. Standard scanning is performed in meander mode with sequential axis motion. Due to the straightforward positioning concept an edge exclusion from 3 to 5 mm is typical. The system is ready to scan in less than 1 minute after power up, with a homing process required once at start. A typical scan of a 200 mm wafer at 1 mm pitch takes less than 10 minutes. The module requires very little maintenance. Under normal conditions lubrication once per year is sufficient.

An optional third axis enables motion in the z direction. This is particularly useful for RMT versions and is available either as a simple z axis or as a closed loop controlled axis for automatic distance adjustment during reflection mode scans.

PLC code is included and the PLC can be controlled via OPC UA. A path planning PLC module is also included and can be extended with additional options. The module supports pitches from 0.1 to 10 mm. A TTL input is available with a trigger rate up to 3 kHz and two independent trigger counters plus reset.

Standard Movement Only
Standard Movement Only
Sensor Mapping Kit with Standard Movement
Sensor Mapping Kit with Standard Movement

SURAGUS Performance Movement Module

The performance movement module is an extension module for the Sensor Mapping Kit. This performance version is the ideal choice for customers who require maximum speed and outstanding measurement quality.

It features a precision table with a maximum scanning area of 320 x 320 mm and positioning aids for wafers from 2 inch up to 300 mm. A solid base plate ensures excellent mechanical stability. The electronic components are mounted on an integrated electronic board located behind the actuators.

The system uses linear motors and achieves movement speeds of up to 600 mm per second. Edge exclusion can be reduced to 1 mm or even completely eliminated while maintaining very high positioning accuracy. The superior scanning concept with synchronous motion in x and y enables intelligent scan paths with higher measurement density in critical areas.

The system is instantly ready to scan. No homing is required thanks to absolute position feedback. Typical scan duration for a 200 mm wafer at 1 mm pitch is less than 1.5 minutes. Maintenance requirements are extremely low, lubrication is only necessary after approximately 500,000 km of travel.

An optional third axis enables motion in the z direction. This is particularly useful for RMT versions and is available either as a simple z axis or as a closed loop controlled axis for automatic distance adjustment during reflection mode scans.

PLC code is included and the PLC can be controlled via OPC UA. A path planning PLC module is also included and can be extended with additional options. The module supports pitches from 0.1 to 10 mm. A TTL input is available with a trigger rate up to 3 kHz and two independent trigger counters plus reset.

Standard Movement Only
Standard Movement Only
Sensor Mapping Kit with Standard Movement
Sensor Mapping Kit with Standard Movement

SURAGUS Mapping Application

SURAGUS Mapping Application is the central software platform for advanced eddy current mapping. It covers the complete workflow from data acquisition to visualization and makes it easy to integrate SURAGUS systems into existing environments.

With the SURAGUS Mapping Application you can

  • acquire measurement data from SURAGUS Sensor Mapping Kits
  • process data, for example perform EEC evaluation or derive secondary parameters such as resistivity
  • visualize measurement results in an intuitive frontend, including detailed maps and statistics

The application is implemented as modern Python device software and is designed to be ready for future extensions. It already supports

  • 2D TTV evaluation using KEYENCE confocal sensors
  • Integration of customer specific secondary software development kits

For system integration the SURAGUS Mapping Application offers a REST API. This allows higher level systems to trigger measurements, retrieve results and embed SURAGUS data directly into existing process control or quality management solutions.

Map IK Sensor

Sensor Only Variant
  • Eddy Current Sensors
  • Control Unit
  • Wafer, Pucks or Boules
  • REST-API Interface
  • Movement System
  • Complete Frontend Solution
send Request
Ideal solution who want extent existing map tools with eddy current measurements​

Map IK – Standard

Sensor + Standard Movement
  • Eddy Current Sensors
  • Control Unit
  • Wafer, Pucks or Boules
  • REST-API Interface
  • 2-Axis Stepper Motors
  • Highest Speed (≤ 150 mm/s)
  • Best Edge Exlusion (only 3-5 mm)
  • Smart Scanning Paths
  • Instant Measurement without Homing
  • Complete Frontend Solution
send request
Ideal solution for companies that need a complete hardware solution with limited budget.

Map IK – Performance

Sensor + Performance Movement
  • Eddy Current Sensors
  • Control Unit
  • Wafer, Pucks or Boules
  • REST-API Interface
  • 3-Axis Linear Motors
  • Highest Speed (≤ 600 mm/s)
  • Best Edge Exlusion (≤ 1 mm)
  • Smart Scanning Paths
  • Instant Measurement without Homing
  • Complete Frontend Solution
send request
Ideal solution for companies that need a complete hardware solution with best measurement capabilities.
Best Choice

Map IK

Complete Turnkey Solution
  • Eddy Current Sensors
  • Control Unit
  • Wafer, Pucks or Boules
  • REST-API Interface
  • 3-Axis Linear Motors
  • Highest Speed (≤ 600 mm/s)
  • Best Edge Exlusion (≤ 1 mm)
  • Smart Scanning Paths
  • Instant Measurement without Homing
  • Complete Frontend Solution
send request
Ideal solution for companies that need ready to go a complete hardware and software solution.​​
Min Effort

Data Table for EddyCus® map IK

Sensor Mapping Kit – Measurement Capabilities

Transmission mode sensor setup
Sheet resistance measurement range 0.05 mOhm/sq – 300,000 Ohm/sq
Reflection mode sensor setup
Resistivity measurement range 0.1 – 1,000 mOhm·cm
Conductivity measurement range 0.01 – 65 MS/m
Sheet resistance measurement range 0.05 – 100,000 Ohm/sq
General features
Calibration package A variety of sheet resistance or resistivity reference standards are available at SURAGUS
Remote software control A variety of sheet resistance or resistivity reference standards are available at SURAGUS
Encoder input ASU Gen1 case: NO
ASU Gen2 case: up to 3x (A/B/Z) via internal Trigger Board
TTL ASU Gen1 case: 2x Trigger count + Reset Edge Mode for PTP-applications Trigger rate up to 3kH
Software trigger Included
SURAGUS MAP Core PLC code included
Path planing PLC module
Rest-API to SURAGUS MAP Core
OPC UA or others to PLC
SECS GEM (E30)

Movement Features

Standard Movement Performance Movement
Base plate Stable table with a maximum scanning area of 320 x 320 mm base plate ensures mechanical rigidity, and an integrated electronic board behind the actuators hosts the electronic components An optional third axis enables motion in the z direction. This is particularly useful for RMT versions and is available either as a simple z axis or as a closed loop controlled axis for automatic distance adjustment during reflection mode scans.
Housing No housing included
Location of electronic components On e-board behind actors
Measurement IPC ASU control unit to run optional application front end
Number of axis Up to 3
third axis enables motion in the z direction. This is particularly useful for RMT versions and is available either as a simple z axis or as a closed loop controlled axis for automatic distance adjustment during reflection mode scans.
SURAGUS MAP Core PLC code included
OPC UA or others to PLC
SECS GEM (E30)
Secondary measurement methodologies Customer integrated secondary SDKs
Substrates Wafer, pucks and boules with 2 inch – 300 mm diameter
Technology Stepper motors Linear motors
Position Precision Feedback High Very High
Edge Exclusion 3 – 5 mm ≤1 mm
Movement Speed Up to 150 mm/s Up to 600 mm/s
Initalization Process Homing process for each imaging Instantly ready to scan (no homing process necessary)
Axle Movement Sequential movement of x and y axis Synchronious movement of x and y axis
Scanning Path Simple meander mode Complex but efficient paths are possible (due to synchronious movement)
Maintenance Lubrication once a year Practically no maintenance (lubrication every 500,000 km)
Reflection Mode Accuracy ±3 % via lift off compensation ±2 % via lift off compensation
±1 % through active piezo distance adaption

SURAGUS Mapping Application Addon

Compatible with SURAGUS Standard Movement Module
SURAGUS Performance Movement Module
Measurement acquisition Included
Data processing Edge effect compensation algorythm (EEC) included
Derive other measures like resistivity
Display data Front end

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Frequently Asked Questions

Sheet resistance, metal layer thickness, resistivity

2 inch up to 300 mm wafers via standard adapters

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