Sheet Resistance Reference Sample Sets
For Recalibration and Periodic Testing of System Accuracy
- Quality assurance
- Process control
- Yield improvement
- Customer trust by documented spool / roll report
Introduction
It is recommended to verify the accuracy for every measurement device at least every 12 months. SURAGUS reference standards are characterized by the use of NIST standards and allow to meet ISO 17025 and ISO 9001. The reference samples have a stable and homogeneous coating and are available in various sheet resistance ranges and various sizes. Depending on the measurement range SURAGUS provides reference set consisting of 4 to 22 samples. SURAGUS guarantees the values for 12 months. Re-certification services are available.
The device is typically used for:
- Calibration of electrical characterization systems
- Validation of system accuracy to meet ISO 9001 and ISO/IEC 17025
Testing Types and Measurement Methods
- Eddy Current
- Two point and four-point probe (4PP)
- Hall effect measurement
- Van der Pauw
Handling
- Standards and reference samples come in sophisticated packaging.
- Non-breakable substrate which is easy and safe to transport
Sizes
- Wafer sized samples are offered in 2 inch, 3 inch, 4 inch, 6 inch, 8 inch and 12 inch
- 10 x 10 mm, 25 x 25 mm, 50 x 50 mm, 100 x 100, 200 x 200 mm, 300 x 300 mm
- Other sizes are on request
Materials and Layer Stack
- SURAGUS developed various layers and layer stacks covering 9 decades of electrical sheet resistance.
- Each layer is deposited with very high homogeneity.
- All samples go through an extensive sample selection and non-contact characterization process
- The used layer stacks are optimized towards low aging
Standards
- SURAGUS manufacturer certification
- ISO/IEC 17025 traceable reference samples on request
- NIST standards on request
Validation and Certification
- All reference samples run through a complex validation process including non-contact sheet resistance imaging to exclude defects and a comprehensive validation process
Data Table for Reference Sample Set
System Features
| Materials | Metal and alloys depending on sheet resistance range |
| Substrates | Foils, glass |
| Validity | 1 year |
| Size | 1 inch to 300 x 300 mm |
| Reference standard | ~1 % to NIST wafer |
| Homogeneity | Better 1 % |
Available Sets
The sets contain pieces with different sheet resistance values covering a range that represents the entire bandwidth.
Set of SURAGUS certified* calibration reference samples …
| (6 pcs.) for 0.001 – 0.1 Ohm/sq | (14 pcs.) for 0.01 – 100 Ohm/sq | (13 pcs.) for 0.1 – 500 Ohm/sq |
| (9 pcs.) for 0.001 – 1 Ohm/sq | (15 pcs.) for 0.01 – 200 Ohm/sq | (14 pcs.) for 0.1 – 1,000 Ohm/sq |
| (15 pcs.) for 0.001 – 100 Ohm/sq | (16 pcs.) for 0.01 – 500 Ohm/sq | (16 pcs.) for 0.1 – 2,000 Ohm/sq |
| (16 pcs.) for 0.001 – 200 Ohm/sq | (17 pcs.) for 0.01 – 1,000 Ohm/sq | (17 pcs.) for 0.1 – 3,000 Ohm/sq |
| (17 pcs.) for 0.001 – 500 Ohm/sq | (19 pcs.) for 0.01 – 2,000 Ohm/sq | (18 pcs.) for 0.1 – 5,000 Ohm/sq |
| (18 pcs.) for 0.001 – 1,000 Ohm/sq | (20 pcs.) for 0.01 – 3,000 Ohm/sq | (4 pcs.) for 100 – 500 Ohm/sq |
| (20 pcs.) for 0.001 – 2,000 Ohm/sq | (21 pcs.) for 0.01 – 5,000 Ohm/sq | (5 pcs.) for 100 – 1,000 Ohm/sq |
| (21 pcs.) for 0.001 – 3,000 Ohm/sq | (8 pcs.) for 0.1 – 10 Ohm/sq | (7 pcs.) for 100 – 2,000 Ohm/sq |
| (22 pcs.) for 0.001 – 5,000 Ohm/sq | (11 pcs.) for 0.1 – 100 Ohm/sq | (8 pcs.) for 100 – 3,000 Ohm/sq |
| (12 pcs.) for 0.1 – 200 Ohm/sq | (9 pcs.) for 100 – 5,000 Ohm/sq |
* Please note that these reference samples are SURAGUS certified. If you require ISO/IEC 17025 traceable reference samples, please contact our sales
team.
