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Reference Sample Sets
Sheet Resistance Reference Sample Sets For Recalibration and Periodic Testing of System Accuracy Quality assurance Process control Yield improvement Customer trust by documented spool / roll report Contact Us Ask for Re-certification Introduction It is recommended to verify the accuracy for every measurement device at least every 12 months. SURAGUS reference standards are characterized by […]
EddyCus® inline MCM
Measurement Chamber Addonfor Deposition Cluster Tools Higher Thin-film and substrate quality through fast and precise Near-process Measurement based on non-contact eddy current technology. Record a Line Profile of the wafer and thin-film. Test directly on product wafers Easy integration into tools Non-contact real time measurement Near-process monitoring High-speed and accurate High repeatability and long term […]
EddyCus® inline ICM
Retro-fit Sensor Integrationfor Deposition Cluster Tools Higher Thin-film quality through fast and precise Near-process Measurement based on non-contact eddy current technology. Record a line profile for each wafer before and after deposition.Sheet Resistance · Metal Layer Thickness · Resistivity Non-contact real time measurement High measurement speed up to 1,000 measurements/ sec. Fixed sensor installation or […]
EddyCus® inline RS
Conductive Cable, Wire and Tube Testing Solutions for Process Control Higher Thin-film and substrate quality through fast and precise Inline Measurement based on non-contact eddy current technology. Quality assurance Process control Yield improvement Customer trust by documented spool / roll report Contact Us Request Demo Measurement Eddy Current Technology Download Data Sheet Contact Page Call […]
EddyCus® inline Sensorline
Full-area Sheet Resistance and Layer Thickness Measurement Solution for Process Control Higher Thin-film and substrate quality through fast and precise multi sensor Inline Measurement based on non-contact eddy current technology. Non-contact real time measurement High measurement speed up to 50 measurements/ sec. Fixed sensor installation or traversing sensor installation Integration of 1 – 99 monitoring […]
EddyCus® inline
Non-Contact Process and Quality Monitoringfor Conductive Materials and Coatings highly flexible inline measurement solutions, seamlessly adaptable to your specific production process. Non-contact real time measurement High measurement speed up to 1,000 measurements/ sec. Fixed sensor installation or traversing sensor installation Integration of 1 – 99 monitoring lanes per system Process control at atmosphere or in […]
EddyCus® ResMapper
Fully Automated Wafer Imaging Device with Automated Cassette Handling System Higher Thin-film and substrate quality through fast and precise mapping devices based on non-contact eddy current technology. High resolution images with over 20 000 measurement points Up to 60 wafers per hour Measurement up to the edge of the sample All-in-one measurement of optical and […]
EddyCus® map 2530 RMT – Mixed Solutions
Multi Application Imaging Device Higher Thin-film and substrate quality through fast and precise mapping devices based on non-contact eddy current technology. High resolution images with over 30 000 measurement points within 4 minutes for best defect detection Measurement up to the edge of the sample Various analyzing options such as line profiles or histogram Various […]
EddyCus® map 2530 RMT
Resistvity Mapping and Defect Identification for Boules and Pucks Fast, precise mapping with non-contact eddy current technology improves thin-film and substrate quality. The short distance to the sample boosts signal strength and allows for a smaller spot size, enabling measurements close to the edge. High resolution images with over 30 000 measurement points within 4 […]
