Precision Optics
recision optics are required in different applications accross several industries, such as semiconductor, industrial sensors and automotive. For achieving excellent optical performance precise metrology instruments are required for deposition processes of:
- Filter coatings (notch, longpass, AR,
- UV, Bandpass for VIS, NIR, LWIR)
- Black chrome
- Mirrors
- Beam splitter
- Veril
- High index
- Low index
Testing
- Sheet resistance
- Conductivity
- Thickness
- Homogeneity
Applications
- Ultra thin glass
- Flexible glass
- Wafer
- Si
- InP
- GaAs
- Standards
- Catalog optics
- Laser optics
Processes
- Wafer level
- Batch systems
- Load lock
- Cluster systems
- Inline
- S2S
- Carrier
Environment
- In-vacuo and ex-vacuo
- In-situ and ex-situ
- Inline and offline
Types
- Filter coatings (Notch, longpass, AR, UV
- Bandpass (VIS, NIR, LWIR)
- Black chrome
- Mirrors
- Beam splitter
- Veril
- High index
- Low index
