EddyCus® map 8060 RMT
Non-contact Resistivity Mapping SystemEddyCus® map 8060 RMT Resistivity and sheet resistance maps of samples up to 600 x 600 millimeter and 100 millimeter tall – boules, pucks, seeds and wafers on one tool, without contact and without sample preparation. Measurable area up to 600 mm x 600 mm Samples up to 100 mm tall, curved […]
EddyCus® map IK
Non-contact Eddy Current Mapping Integration Kit for Sheet Resistance, Film Thickness and Resistivity Imaging Modular Sensor mapping integration kit to generate metal thinfilm thickness, sheet resistance or resistivity images of wafers, pucks and boules High resolution images with up to 70,000 measurement points (300 mm @ 1 mm pitch) Up to 40 wafers per hour […]
EddyCus® inline SLIM
EddyCus® inline SLIM – Smart Link Integrated Module Use existing gates and link transfers: equip them with a measurement add-on to generate early-stage measurement data. Non-contact and non-destructive Near-process monitoring High-speed and accurate High repeatability and long term stability Test directly on product wafers Easy integration into tools Send a Request Request Demo Measurement Eddy […]
EddyCus® inline RS for Pastes and Slurries
Conductive Slurry and Paste Testing Solutions for Process Control Higher process and material quality through fast and precise Inline Measurement based on non-contact eddy current technology. Quality assurance Process control Yield improvement Customer trust by documented spool / roll report Send a Request Request Demo Measurement Eddy Current Technology Download Data Sheet Contact Page Call […]
EddyCus® lab 2020 RMB for Slurry and Paste
Multi-Purpose Single Point Tester for Pastes and Slurries Pastes and Slurries Composition quality through fast and precise laboratory devices based on non-contact eddy current technology. Real time measurement Accurate single-point measurement of the permittivity for non-conductive materials (F/m) Manual mapping of permittivity guided by an easy-to-handle software Send a Request Request Demo Measurement Eddy Current […]
Contact Us
Do you need help with product selection?
EddyCus® inline MCM
Measurement Chamber Addonfor Deposition Cluster Tools Higher Thin-film and substrate quality through fast and precise Near-process Measurement based on non-contact eddy current technology. Record a Line Profile of the wafer and thin-film. Test directly on product wafers Easy integration into tools Non-contact real time measurement Near-process monitoring High-speed and accurate High repeatability and long term […]
EddyCus® inline ICM
Retro-fit Sensor Integrationfor Deposition Cluster Tools Higher Thin-film quality through fast and precise Near-process Measurement based on non-contact eddy current technology. Record a line profile for each wafer before and after deposition.Sheet Resistance · Metal Layer Thickness · Resistivity Non-contact real time measurement High measurement speed up to 1,000 measurements/ sec. Fixed sensor installation or […]
EddyCus® inline RS
Conductive Cable, Wire and Tube Testing Solutions for Process Control Higher Thin-film and substrate quality through fast and precise Inline Measurement based on non-contact eddy current technology. Quality assurance Process control Yield improvement Customer trust by documented spool / roll report Send a Request Request Demo Measurement Eddy Current Technology Download Data Sheet Contact Page […]
EddyCus® inline Sensorline
Full-area Sheet Resistance and Layer Thickness Measurement Solution for Process Control Higher Thin-film and substrate quality through fast and precise multi sensor Inline Measurement based on non-contact eddy current technology. Non-contact real time measurement High measurement speed up to 50 measurements/ sec. Fixed sensor installation or traversing sensor installation Integration of 1 – 99 monitoring […]